Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Russia, 119334, Moscow, Leninsky ave., 32A
Cand. Sci. (Phys.-Math.), Senior Scientific Researcher of the Development and Research of Micro- and Nanosystems Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119334, Moscow, Leninsky ave., 32A)
