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Батюня Людмила Павловна

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The technology of producing BN films by the magnetron dusting method has been considered. The electrophysical properties and the structure of the films have been investigated. The possibility of producing the optically transparent BN films, having the mechanically strong diamond-like structure, has been determined. The produced BN films can be recommended as the protective coatings for various designs, including, also, the multi-layer film structures used in electron devices as well as in technology of production of electronic products.

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