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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika

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Uzdovskiy Valeriy Vladimirovich

Denisova Elena Aleksandrovna

Kalmykov Rustam Mukhamedovich

Dakhir S. Gaev

Kabardino-Balkarian State University named after H. M. Berbekov (Russia, 360004, Nalchik, Chernyshevsky st., 173)
Cand. Sci. (Chem.), Director of the Scientific and Technological Center for Microelectronics and Nanotechnology, Kabardino-Balkarian State University named after H. M. Berbekov (Russia, 360004, Kabardino-Balkarian Republic, Nalchik, Chernyshevsky st., 173)

Anton N. Boiko

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Nano- and Microsystem Engineering, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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