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Egor D. Grinakovskiy

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1SMC “Technological Centre”, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7
PhD student, Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Process Engineer of Pilot Production, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Sergey V. Dubkov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Eng.), Director of the Institute of Advanced Materials and Technologies, Head of the Research Laboratory “Photonic Sensors and Plasmonic Materials”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Sergey N. Skorik

SMC “Technological Centre”, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7
Senior Engineer of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Andrey I. Savitskiy

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
Cand. Sci. (Eng.), Senior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Junior Scientific Researcher of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Evgeny P. Kitsyuk

SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Head of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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