Persons

Vladislav D. Gromov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Laboratory Assistant of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Nikolay D. Kurochitsky

Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)
Technician, Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)

Maksim S. Komlenok

Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)
Cand. Sci. (Phys.-Math.), Senior Researcher, Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)

Aleksandr V. Pavlikov

Lomonosov Moscow State University (Russia, 119991, GSP-1, Moscow, Leninskie gory, 1, bld. 2)
Cand. Sci. (Phys.-Math.), Assoc. Prof. of the Physics Faculty, Lomonosov Moscow State University (Russia, 119991, GSP-1, Moscow, Leninskie gory, 1, bld. 2)

Andrey V. Anikin

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Director of the Scientific and Technical Center for Photomask Blanks, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

124498, Moscow, Zelenograd, Bld. 1, Shokin Square, MIET, editorial office of the Journal "Proceedings of Universities. Electronics", room 7231

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