Persons

The problems of finite-element modeling the performance characteristics of SOI-based MEMS actuators using the applied programs have been considered. The calculation results of the MEMS actuator structure for a wide frequency range have been presented. It has been shown that due to an increase of the applied constant voltage to the control electrodes the growth of the active capacitance and the decrease of the parasitic one occur, besides, the drift of the gain-frequency characteristic shifts to the low-frequency region.

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