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Поляков Максим Викторович

Trifonov Aleksey Yurevich

Elena M. Eganova

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)
Cand. Sci. (Eng.), Senior Researcher of the Micro- and Nanoelectronics and Biosensorics Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)

Lidiya S. Volkova

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Moscow, Russia
Junior Researcher of the Structural Analysis and Metrology Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky Ave, 32А)

Dudin Aleksandr Aleksandrovich

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