Persons
Mikhail G. Putrya
Dr. Sci. (Eng.), Prof. of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Евгений Юрьевич Котляров
Dr. Sci. (Phys.-Math.), Director of SMC «Technological Center» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Researcher, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky Prospect, 32A)