Persons
Mounting Production Manager, JSC “Zelenograd Nanotechnology Center” (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Denis V. Vertyanov
National Research University of Electronic Technology, Moscow, Russia