Persons
Viktor B. Yakovlev
Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119334, Moscow, Leninsky Ave, 32A)
Dr. Sci. (Phys.-Math.), Prof. of the Institute of Physics and Applied Mathematics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Igor V. Lavrov
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Владимир Николаевич Маршалов