Dr. Sci. (Eng.), Assoc. Prof., Head of the Information and Measuring Equipment and Metrology Department, Penza State University (Russia, 440026, Penza, Krasnaya st., 40)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Senior Engineer of the Center for Collective Use “Microsystem Technology and Electronic Component Base”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)