Persons
Vitaliy I. Smirnov
Ulyanovsk State Technical University, Russia, 432027, Ulyanovsk, Severny Venets st., 32); Ulyanovsk branch of Kotel’nikov Institute of Radio Engineering and Electronics of Russian Academy of Sciences, Russia, 432071, Ulyanovsk, Goncharov st., 48, bld. 2)
Alexey A. Sherchenkov
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Irina V. Sagunova
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Eng.), Measurement Specialist, R&D Center of Thin Film Technologies in Energetics (Russia, 194021, St. Petersburg, Polytechnicheskaya st., 28)
PhD Student, Junior Researcher of the Institute of Perspective Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)