Academician of Russian Academy of Sciences, Dr. Sci. (Phys.-Math.), Prof., Chief Scientist of Lebedev Physical Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninskiy ave., 53), Head of the Quantum Physics and Nanoelectronics Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)