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Viktor I. Cherkunov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; JSC NPP ESTO, Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 1
PhD student of the Institute of Micro Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Head of the Vacuum Spraying Equipment Department, JSC NPP ESTO (Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 1)

Mikhail I. Usov

“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Engineer, “Laboratory of Micro Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Yakov I. Putilov

“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Engineer, “Laboratory of Micro Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Vitaly D. Kovalev

Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3
Head of the Physico-Analytical Research Group, Angstrem JSC (Russia, 122460, Moscow, Zelenograd, Shokina Square, 2, bld. 3)

Andrey M. Sokolov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3
PhD student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer-Technologist of the Deposition Laboratory, Angstrem JSC (Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3)
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