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Proceedings of universities. Electronics: Electronics

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Nadezhda A. Solomkina

National Research University of Electronic Technology, Moscow, Russia; “Laboratory of Mi-crodevices” LLC, Moscow, Russia
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Design Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Valerii P. Zaharov

National Research University of Electronic Technology, Moscow, Russia; “Laboratory of Mi-crodevices” LLC, Moscow, Russia
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Pavel V. Erkin

National Research University of Electronic Technology, Moscow, Russia; “Laboratory of Mi-crodevices” LLC, Moscow, Russia
Master’s degree student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Alexander A. Galkin

National Research University of Electronic Technology, Moscow, Russia; “Laboratory of Mi-crodevices” LLC, Moscow, Russia
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Mikhail D. Kochergin

National Research University of Electronic Technology Moscow, Russia
Design Engineer of the Research Laboratory of Advanced Technologies for the Packaging and Production of 3D Microsystems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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