Persons
Lead Engineer, National Research University of Electronic Technology Core facilities center «MEMS and electronic components» (Russia, 124527, Moscow, Zelenograd, Solar Alley, 6)
Dr. Sci. (Chem.), Prof., Kurnakov Insitute of General and Inorganic Chemistryof Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky pr., 31)
Cand. Sci. (Phys.-Math.), Senior Researcher, Ryazan State Radio Engineering University (Russia, 390005, Ryazan, Gagarin st., 59)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Perspective Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Student of the Institute of Perspective Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)