In microelectromechanical (MEMS) sensors the construction of a comb actuator is used for excitation of the resonator. In this article, we found a refined equation for the calculation of the electrostatic force of such an actuator. With the help of simulation in ANSYS program the effect of overlap amount between the teeth of the combs on the electrostatic force and the capacitance has been studied as well as the changes of the frequency of the resonator when it is exerted by the force. Similar studies have been implemented for a bar construction of the resonator, the usage of which, as comb design with small overlap of teeth, allows to decrease the parasitic electrostatic forces (along axes y , z ) and to increase the sensitivity of the frequency microaccelerometer due to a larger change in the frequency of the resonator oscillations when subjected to forces.
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