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For determination of the optimal thermodynamic processes in the air conditioning and filtration the exergy method has been used. The estimation of separate elements and of the whole complex the air conditioning and filtration based on the exergy efficiency calculation is the main purpose of the exergy analysis. The possibility of using the method of thermodynamic exergy analysis as the means of monitoring the energy efficiency of clean rooms air handling system has been investigated. The mathematical model of an air conditioning system with the recirculation circuit has been used. The estimates of the exergy efficiency in the selected system, air conditioning and the Exergy losses in its base elements depending on various factors have been performed. The application of the exergy analysis enables to identify the main ways to reduce the energy losses and choose the best option circuitry air conditioning and air filtration.

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