In the vibration microelectromechanical system (MEMS) there is often a problem associated with changes in the parameters of miniature structures due to temperature sensitivity and fatigue of microelements. The result is a change in the natural frequency of the system. In most vibration devices, such as MEMS gyroscopes, resonance plays an important role, which determines the efficiency of operation, the measurement range and the scale factor of the device. The work examines the causes of changes in the frequency characteristics and natural frequencies of the vibration structure, which are of great importance when analyzing the technical characteristics of a MEMS device. The analysis of frequency characteristics of a MEMS multi-axis vibrating has been carried out. A mathematical model for determining the resonant frequency shift has been presented, and a system with phase synchronization has been constructed to track the natural frequency of the primary oscillations channel. A method with using a phase locked loop system has been developed for tracking and maintaining resonance in a primary oscillations channel. The obtained experimental result is consistent with the theoretical analysis. The resonant frequency of the channel of primary oscillations detected 12.52 kHz with a maximum amplitude of oscillation of 520 mV.
1. Sun X., Horowitz R., Komvopoulos K. Stability and resolution analysis of a phase-locked loop natural frequency tracking system for MEMS fatigue testing // J. of Dynamic Systems, Meas-urement, and Control. – 2002. – Vol. 124. – P. 599–605.
2. Ло Ван Хао, Нестеренко Т.Г. Анализ эффекта паразитной емкости в режиме движения микроэлектромеханическогогироскопа // Изв. ЮФУ. Технические науки. – 2018. – № 2 (196). – С. 54–67.
3. Лысенко И.Е. Проектирование сенсорных и актюаторных элементов микросистемной техники: учеб. для вузов. – Таганрог: ТРТУ, 2005. – 103 c.
4. Mikko Saukoski. System and circuit design for a capacitive MEMS gyroscope // Dr. Eng. Sci. diss. – 2008. – P. 68–73.
5. Alexander A.T., Andrei M.S. Capacitive detection in resonant MEMS with arbitrary ampli-tude of motion // J. Micromech. Microeng. – 2007. – Vol. 17. – P. 1583–1592.
6. Барбин Е.С. Динамика многокомпонентного микромеханического гироскопа-акселерометра с развязывающими рамками: дис. ... канд. тех. наук. – Томск, 2016. – C. 111–116.
7. Electrical coupling suppression and transient response improvement for a microgyroscope using ascending frequency drive with a 2-DOF PID controller / J Cui, Z.Y. Guo, Z.C. Yang et al. // J. Micromech. Microeng. – 2011. – Vol. 21. – 11 р.
8. Дубков А.А., Агудов Н.В. Преобразование Лапласа: учеб. для вузов. – Н. Новгород: Ни-жегородский госуниверситет; 2016. – 36 с.
9. Cenk Acar, Andrei M.S. MEMS vibratory gyroscopes structural approaches to improve ro-bustness // MEMS Reference Shelf. Library of Congress Control Number: 2008932165, 2009. – 262 p.
10. Cenk Acar, Andrei M.S. Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement // J. Micromech. Microeng. – 2005. – Vol. 15. – P. 1092–1101.
11. Said EmreAlper, Tayfun Akin. An automatically mode-matched MEMSgyroscope with wide and tunable bandwidth // J. Micromech. systems. – 2014. – Vol. 23.– P. 285–296.
12. W. Merlijnvan Spengen, Tjerk H. Oosterkamp. A sensitive electronic capacitance meas-urement system to measure the comb drive motion of surface micromachined MEMS devices // J. Micromech. Microeng. – 2007. – Vol. 17. – P. 828–834.
13. Said EmreAlper. An automatically mode-matched MEMSgyroscope with wide and tunable bandwidth: Dis. Doct. Philosophy in electrical and electronics engineering. – 2005. – 301p.
14. Dunzhu Xia, Shuling Chen, Shourong Wang. Development of a prototype miniature silicon microgyroscope // J. Sensors.– 2009.– Vol. 9.– P. 4587–4605.
15. 74HC/HCT4046A Phase-locked-loop with VCO // Datasheet. – 1997. – 34 p.
16. Хоровиц П., Хилл У. Искусство схемотехники: учеб. пособие. – 4-е изд. – М.: Мир, 1993. – 371 с.