Resonant Tuning System of MEMS Multi-Axis Vibrating Gyroscope

In the vibration microelectromechanical system (MEMS) there is often a problem associated with changes in the parameters of miniature structures due to temperature sensitivity and fatigue of microelements. The result is a change in the natural frequency of the system. In most vibration devices, such as MEMS gyroscopes, resonance plays an important role, which determines the efficiency of operation, the measurement range and the scale factor of the device. The work examines the causes of changes in the frequency characteristics and natural frequencies of the vibration structure, which are of great importance when analyzing the technical characteristics of a MEMS device. The analysis of frequency characteristics of a MEMS multi-axis vibrating has been carried out. A mathematical model for determining the resonant frequency shift has been presented, and a system with phase synchronization has been constructed to track the natural frequency of the primary oscillations channel. A method with using a phase locked loop system has been developed for tracking and maintaining resonance in a primary oscillations channel. The obtained experimental result is consistent with the theoretical analysis. The resonant frequency of the channel of primary oscillations detected 12.52 kHz with a maximum amplitude of oscillation of 520 mV.
Lo Van Hao
National Research Tomsk Polytechnic University, Tomsk, Russia
Tamara G. Nesterenko
National Research Tomsk Polytechnic University, Tomsk, Russia