When designing MEMS accelerometers, it is necessary to provide the high sensitivity of the instrument, which is directly related to the amplitude of deflection of the inertial mass under the acceleration effect. The inertial mass increase results in the sensor sensitivity increase. The results of the calculation of the spring constant of the micro-mechanical accelerometer folded beam have been presented. The modeling using the ANSYS program, confirming the calculation results, has been performed. The use of the folded beams having compact sizes permits to increase the efficiency of the resonator operation, to achieve greater displacement in direction of the acceleration and stability of the inertial mass in other directions, taking into account the flexibility and rigidity in different directions.
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