Various types of parasitic influences must be considered at the stage of designing sensitive element of a micromechanical capacitive accelerometer (MMA) and the whole MMA construction, and throughout its lifecycle stages, to ensure consistent performance and parameter stability of MMA. Due regard to actual operating conditions is a primary consideration for designers. In this work, the influence of random vibration on the functioning of a 2-electrode sensitive element of an MMA with a sandwich construction using the principle of operation based on a change in the relative dielectric constant of a capacitor dielectric under acceleration was investigated. In the structure of the investigated sensitive element with one axis of sensitivity, the inertial mass is suspended on folded springs and is located between two fixed electrodes. Using the Ansys program, the deformations of the inertial mass of the sensitive element and the change in the capacity in the sensitive element were calculated, which occur when it is exposed to acceleration up to 5 g along the working axis and up to 50 g along the non-working axes and random vibration along the working axis X and along the non-working axes Y and Z . The random vibration affecting the sensitive element had a profile, the frequency of which was 20 Hz at 0.01 g / Hz, the frequency from 80 to 350 Hz at 0.04 g / Hz, 2000 Hz at 0.01 g / Hz. The changes in the capacity in the sensitive element of MMA under the influence of random vibration on it were calculated. Results have been obtained that confirm the performance of the sensitive element of MMA under conditions of significant impacts along non-working axes. The investigated sensitive element model requires further refinement to be used under conditions of exposure to random vibration.
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