Urrently, the sensors and actuators based on the MEMS products are increasingly used in a variety of applications. In the process of developing new products of the nano and microsystem equipment it is necessary to reliably determine the parameters of the obtained samples. The stand for investigation of the MEMS-flow converters, operating in the anemometric and calorimetric modes, has been presented. The study on dependences of the MEMS-converter of gas flow on gas flow, temperature and thermoresistors parameters occurs in the millisecond time intervals and is completely automated, which makes it easy to collect the measurement statistics. The high speed of interrogation makes it possible to understand the transient processes that occur when the thermistors are heated and cooled, and to determine the optimum pulse duration for the measurement. Due to the fact that the stand uses a climatic chamber, the measurements can be carried out at different gas temperatures, which is quite important when making a corrective compensation of the temperature error of the converter. In addition, the stand permits to develop the schemes of preliminary analog processing of the converter signals. The proposed stand makes possible measurement at various temperatures of gas and environment from -40 up to 60 °C. It controls the atmospheric pressure, permits to specify the gas consumption in the 0-119 l/min range. The automated stand significantly reduces the time for execution of the tests on the converters being developed and makes it possible to quickly obtain the transient characteristic of MEMS-converters for installation into an assembly.
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Key words:
automated stand, mems, gas flow, flowmeter
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Published in:
micro- and nanosystem technology
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Bibliography link:
Ryabov V.T., Djuzhev N.A., Novikov D.V. Automation of process of measuring parameters of sensitive elements of gas consumption actuators // Proc. of Universities. Electronics. –¬ 2018. –¬ Vol. 23. – № 1. – P. 62–71. DOI: 10.24151/1561-5405-2018-23-1-62-71
Dmitry V. Novikov
National Research University of Electronic Technology, Moscow, Russia
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