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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Publication of the journal
Elektronika
Publication of the journal
The section is currently being updated
Articles
TECHNOLOGICAL PROCESSES
Substantiation of the list of marker pollutants of microelectronic production
135 - 142
Investigation of the adhesion strength of functional layers of photomasks and photomask blanks with design standards of 90–65 nm
143 - 157
Focused ion beam fabrication of axisymmetric structures in silicon dioxide using the edge milling process of the line-by-line scanning strategy
158 - 167