Persons
Illarion P. Lee
JSC Pluton (Russia, 105120, Moscow, Nizhnyaya Syromyatnicheskaya st., 11)
PhD student of the Electronic Technologies in Mechanical Engineering Department, Bauman Moscow State Technical University (Russia, 105005, Moscow, 2-ya Baumanskaya st., 5), Deputy Chief Department of Special Machine Building, JSC «Pluton» (Russia, 105120, Moscow, N.Syromiatnicheskaya st., 11)
Vladimir S. Petrov
JSC Pluton (Russia, 105120, Moscow, Nizhnyaya Syromyatnicheskaya st., 11)
Cand. Sci. (Eng.), Head of the Vacuum Technology Laboratory, JSC «Pluton» (Russia, 105120, Moscow, N.Syromiatnicheskaya st., 11)
Dr. Sci. (Eng.), Assoc. Prof. of the Nano- and Microelectronics Department, Penza State University (Russia, 440026, Penza, Krasnaya st., 40)