Persons
PhD student of the Electronic Technologies in Mechanical Engineering Department, Bauman Moscow State Technical University (Russia, 105005, Moscow, 2-ya Baumanskaya st., 5), Deputy Chief Department of Special Machine Building, JSC «Pluton» (Russia, 105120, Moscow, N.Syromiatnicheskaya st., 11)
Cand. Sci. (Eng.), Assoc. Prof., Technologist, Engineer, JSC «Pluton» (Russia, 105120, Moscow, N.Syromiatnicheskaya st., 11)
Cand. Sci. (Eng.), Head of the Vacuum Technology Laboratory, JSC «Pluton» (Russia, 105120, Moscow, N.Syromiatnicheskaya st., 11)
Dr. Sci. (Eng.), Assoc. Prof. of the Nano- and Microelectronics Department, Penza State University (Russia, 440026, Penza, Krasnaya st., 40)
Engineer of the Information and Measuring Equipment and Metrology Department, Penza State University (Russia, 440026, Penza, Krasnaya st., 40)