phD of technical sciences, docent of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Quantum Physic and Nanoelectronic Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD of physico-mathematical sciences, associate professor of the Quantum Physic and Nanoelectronic Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Leading Engineer of the Scientific and Technical Center of Physics and Technology Institute of the V.I. Vernadsky Crimean Federal University (Russia, 295007, Republic of Crimea, Simferopol, Vernadskogo Prospekt, 4)