lead engineer, Ulyanovsk Branch of Kotel’nikov Institute of Radioengineering and Electronics of Russian Academy of Sciences (Russia, 432071, Ulyanovsk, Goncharov st., 48/2
postgraduate of the Quantum Physics and Nanoelectronics Department, engineer of second category of laboratory of Radiation Methods of Technology and Analysis, National Research University of Electronic Technology (Russia,124498, Moscow, Zelenograd, Shokin sq., 1)
doctor of physico-mathematical sciences, professor, chief of laboratory of Radiation Methods of Technology and Analysis, National Research University of Electronic Technology, leading researcher (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), laboratory X-ray Methods of Nanostructure Diagnostics, P.N. Lebedev Physical Institute of Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky prosp., 53)
senior metrology applications engineer SC «Angstrem-Т» (124498, Moscow, Zelenograd, Georglyevskiy prosp., 7), PhD student of the Quantum Physics and Nanoelectronics Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)