Persons

The dependencies of deep silicon etching performances on the process parameters have been investigated. To find the optimal recipes, which provide a high selectivity to a mask and the ARDE decrease, the method of planning the multifactorial experiments has been utilized. The investigation results have been used for manufacturing the MEMS real structures.

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The results of development of the group of tensoresistive pressure transducers manufactured by the bulk micromachining technology have been presented. The following products have been considered: single-channel transducers for absolute and gauge pressure based on the complex shaped membranes with the built-in overload protection. The advantages of the developed sensors in comparison with the pressure transducers, created on the basis of silicon planar membranes and the membrane with a rigid center have been shown; multi-channel pressure scanner for measuring pressure on the surface of the aircraft models tested in a wind channel. The constructive-technological principles of creating the multi-channel modules for measurement of gas-dynamic flows have been presented; the matrices of the pressure sensitive elements and modules based on them for tactile sensors have been presented. The structure of the silicon matrix of pressure sensitive elements and modules based on them, intended for use in the system for tactile diagnostics of internal organs during operations of minimally invasive surgery have been presented.

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