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Polina A. Chilikina

Scientific and Industrial Enterprise “Melitta” LTD, Russia, 117437, Moscow, Miklukho-Maklaya st., 16/10, bld. 1)
Junior Research Assistant of the Scientific Research Laboratory, Scientific and Industrial Enterprise “Melitta” LTD (Russia, 117437, Moscow, Miklukho-Maklaya st., 16/10, bld. 1)

Alexey O. Potapenko

Scientific and Industrial Enterprise “Melitta” LTD, Russia, 117437, Moscow, Miklukho-Maklaya st., 16/10, bld. 1)
Research Associate of the Scientific Research Laboratory, Scientific and Industrial Enterprise “Melitta” LTD (Russia, 117437, Moscow, Miklukho-Maklaya st., 16/10, bld. 1)

Alexey V. Bragin

Bauman Moscow State Technical University, Russia, 105005, Moscow, 2nd Baumanskaya st., 5, bld. 1
Senior Lecturer of the Theoretical Informatics and Computer Technologies Department, Bauman Moscow State Technical University (Russia, 105005, Moscow, 2nd Baumanskaya st., 5, bld. 1)

Vyacheslav V. Kazmiruk

Institute of Problems of Microelectronics Technology and Special Clean Materials of the Russian Academy of Sciences, Russia, 142432, Chernogolovka, Akademik Osipyan st., 6
Cand. Sci. (Phys.-Math.), Head of the Scanning Electron Microscopy Laboratory, Institute of Problems of Microelectronics Technology and Special Clean Materials of the Russian Academy of Sciences (Russia, 142432, Chernogolovka, Akademik Osipyan st., 6)

Lyudmila A. Kuzmina

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; JSC NPP ESTO, Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 1
Master's degree student of the Institute of Micro Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Head of the Production Preparation Department, JSC NPP ESTO (Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 1)
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