Persons
Sergey A. Golubkov
JSC “Zelenograd Nanotechnology Center” (Russia, 124527, Moscow, Zelenograd, Solnechnaya prwy, 6)
Tatyana V. Grigoreva
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Elena V. Selyutina
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Leonid R. Boev
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)