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Захаров Валерий Петрович

Pavel V. Erkin

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Master’s degree student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Aleksander A. Galkin

“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Engineer, “Laboratory of Micro Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)

Victoria V. Matesheva

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Russia, 115409, Moscow, Kashirskoe hwy., 31
Student of National Research Nuclear University MEPhI (Moscow Engineering Physics Institute) (Russia, 115409, Moscow, Kashirskoe hwy., 31)

Rafael R. Aubakirov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Biomedical Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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