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Boris V. Shiryaev

JSC “Scientific Research Institute of Semiconductor Devices” (Russia, 634034, Tomsk, Krasnoarmeyskaya st., 99A)
Cand. Sci. (Eng.), Software Engineer, JSC “Scientific Research Institute of Semiconductor Devices” (Russia, 634034, Tomsk, Krasnoarmeyskaya st., 99A)

Khasbi B. Kushchov

Kabardino-Balkarian State University named after H. M. Berbekov (Russia, 360004, Kabardino-Balkarian Republic, Nalchik, Chernyshevsky st., 173)
Dr. Sci. (Chem.), Prof., Head of the Inorganic and Physical Chemistry Department, Kabardino-Balkarian State University named after H. M. Berbekov (Russia, 360004, Kabardino-Balkarian Republic, Nalchik, Chernyshevsky st., 173)

Sergey A. Golubkov

JSC “Zelenograd Nanotechnology Center” (Russia, 124527, Moscow, Zelenograd, Solnechnaya prwy, 6)
Leading Process Engineer of JSC “Zelenograd Nanotechnology Center” (Russia, 124527, Moscow, Zelenograd, Solnechnaya prwy, 6)

Tatyana V. Grigoreva

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Elena V. Selyutina

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
PhD student, Engineer of the Institute of Biomedical Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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