Persons
Head of Laboratory, SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Master of Engineering and Technology, Senior Lecturer of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)