Persons

PhD student of the Institute of Integrated Electronics named after Academician K. A. Valiev, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Process Engineer of the Plasma Chemical Processes Section of the Pilot Production, RPC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)