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Alla I. Gulidova

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Student, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Grigory N. Pestov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
Engineer of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Victoria B. Glukhenkaya

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Engineer of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Natalya V. Komarova

SMC “Technological Centre”, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7
Cand. Sci. (Chem.), Senior Scientific Researcher of the Scientific Research Laboratory of Integrated Biochemical Nanosensors, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Kirill V. Puchnin

SMC “Technological Centre”, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7
Cand. Sci. (Chem.), Scientific Researcher of the Scientific Research Laboratory of Integrated Biochemical Nanosensors, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
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