Persons
Nikolay M. Zaryankin
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Dr. Sci. (Eng.), Prof., National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Stepan A. Anchutin
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Elena S. Kochurina
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Deputy Chief Engineer of the Branch of the Scientific and Technical Center “Belmikrosistemy” of JSC “Integral” – “Integral” Holding Management Company (Republic of Belarus, 220108, Minsk, Kazints I. P. st., 121A/2)