Persons
Cand. Sci (Eng.), Researcher of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Leading Engineer of the Bauman Moscow State Technical University (Russia, 105005, Moscow, 2-ya Baumanskaya, 5, bld. 1)
Sergey V. Umnyashkin
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Курбан Алимагадович Алимагадов
Сироткин Владимир Юрьевич