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Yury M. Meleshin

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Micro Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1),

Khasanov Marat Salavatovich

engineer of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq.,1)

Oreshkin Vitaliy Ivanovich

Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq.,1)

Konstantin S. Lyalin

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Phys.-Math.), Assoc. Prof., Deputy Chief Designer of the Research Institute of Computing and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Aleksey L. Pereverzev

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Dr. Sci. (Eng.), Assoc. Prof., Director of the Institute of Micro-Devices and Control Systems, Vice-Rector for Innovative Development, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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