Persons

The parameters of low-frequency (LF) noise with a look spectrum G ( f ) ~1/ f are widely used for diagnostics of quality and reliability of semiconductor devices. For metrological support of the gages for the LF-noise parameters the problem of development of the LF-noise generator with an adjustable spectrum form indicator γ arises. The block diagram of the LF-noise generator with a source of white noise and the multilink RC-filter with variable and additional resistors in RC-links has been proposed. An application in the RC-links of the filter of dual variable resistors permits to change the spectrum form indicator γ ranging from 0 to 4 in the frequency range up to 6 decades. The experimental check of the generator with the 6-unit filter has shown an opportunity to synthesize a difficult range of LF-noise with the noise spectrum form indicator close to the value established by an operator.

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