Persons
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq.,1)
Konstantin S. Lyalin
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Aleksey L. Pereverzev
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Senior Research Fellow of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (124498, Russia, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (124498, Russia, Moscow, Zelenograd, Shokin sq., 1)