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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Persons
Elektronika
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Senior Engineer, Central Research Institute of Chemistry and Mechanics (Russia, 115487, Moscow, Nagatinskaya st., 16A)
Article author
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bonding
SLID
surface tension
Wafer Level Packaging
MEMS
wafer-level packaging
WLP
galvanic deposition
scanning acoustic microscopy
scanning electronic microscopy
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Study on the role of hydrostatic effects in molten Sn layer in the formation of a vacuum-tight SLID coupling of Cu-Sn
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The MEMS wafer-level sealing technology based on SLID structures grown from Cu-Sn organometallic complexes electrolytes
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