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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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capacitive pressure sensor
membrane
sensitive element
MEMS
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Investigation of the possibilities of increasing the sensitivity of a capacitive-type MEMS pressure sensor with membranes of various geometric shapes
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