Persons
Cand. Sci. (Chem.), Senior Researcher of the Chemistry Department, Lomonosov Moscow State University (Russia, 119991, Moscow, Leninskie Gory, 1, bld. 3)
Student, Lomonosov Moscow State University (Russia, 119991, Moscow, Leninskie Gory, 1, bld. 3)
Junior Researcher of the Research Laboratory New Technological Processes, SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Head of the Research Laboratory Nanomicroelectromechanical Systems, SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Research Engineer of the CAD Department, Institute for Design Problems in Microelectronics of Russian Academy of Sciences (Russia, 124365, Moscow, Zelenograd, Sovetskaya st., 3)