Persons

Dmitry P. Argunov

JSC “Scientific Research Institute of Semiconductor Devices”, Tomsk, Russia
Software Engineer, JSC “Scientific Research Institute of Semiconductor Devices” (Russia, 634034, Tomsk, Krasnoarmeyskaya st., 99A)

Boris V. Shiryaev

JSC “Scientific Research Institute of Semiconductor Devices”, Tomsk, Russia
Cand. Sci. (Eng.), Software Engineer, JSC “Scientific Research Institute of Semiconductor Devices” (Russia, 634034, Tomsk, Krasnoarmeyskaya st., 99A)

Sergey A. Golubkov

JSC “Zelenograd Nanotechnology Center”, Moscow, Russia
Leading Process Engineer of JSC “Zelenograd Nanotechnology Center” (Russia, 124527, Moscow, Zelenograd, Solnechnaya prwy, 6),

Tatyana V. Grigoreva

National Research University of Electronic Technology, Moscow, Russia
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Khasbi B. Kushchov

Kabardino-Balkarian State University named after H. M. Berbekov, Nalchik, Russia
Dr. Sci. (Chem.), Prof., Head of the Inorganic and Physical Chemistry Department, Kabardino-Balkarian State University named after H. M. Berbekov (Russia, 360004, Kabardino-Balkarian Republic, Nalchik, Chernyshevsky st., 173)