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Alexander V. Rumyantsev

National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Phys.-Math.), Assoc. Prof. of the Institute of Physics and Applied Mathematics, Senior Researcher of the Electron Microscopy Research Laboratory, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Novak Viktor Rudolfovich

Cand. Sci. (Phys.-Math.), Leading Researcher, LLC «NT-MDT» (Russia, 124460, Moscow, Zelenograd, 4922 proezd, 4, build. 3)

Andrey V. Novak

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Head of the Deposition Laboratory, Angstrem JSC (Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3)

Abazyan S S

PhD student of the Yerevan State University (Armenia, Yerevan, 0025, 1 Alex Manoogian)

Calarco Raffaella

Dr., Research Director, CNR Institute for Microelectronics and Microsystems (Via del Fosso del Cavaliene 100, 00133, Roma, Italy)
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