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Research Engineer of the Advanced Development Department, JSC NPP ESTO (Russia, 124498, Moscow, Zelenograd, Georgievsky Ave, 5, bld. 1)

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Study of substrate temperature uniformity in a vacuum-plasma etcher

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Month of publication: February

Issue no. 2

Month of publication: April

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Month of publication: June

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Month of publication: August

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Month of publication: December

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11.03.2026 Vol. 31, no. 1, 2026 has been published

Dear colleagues!
We are pleased to inform you that latest issue of scientific and technical journal "Proceedings of Universities. Electronics", vol. 31, no. 1, 2026, has been published on February 16, 2026.

25.02.2026 Please be advised

Starting from 2027, according to Notice received by our Editorial Office, the Pleiades Publishing group of companies discontinues the collaboration with our journal.
Articles published in the Journal “Proceedings of Universities. Electronics” will not be included in additional issues of the journals Semiconductors (iss. 13) and Russian Microelectronics (iss. 7) anymore.

26.12.2025 Vol. 30, no. 6, 2025 has been published

Dear colleagues!
We are pleased to inform you that latest issue of scientific and technical journal "Proceedings of Universities. Electronics", vol. 30, no. 6, 2025, has been published on December 09, 2025.

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