Persons
Evgeny P. Kitsyuk
SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Dmitry G. Gromov
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); I. M. Sechenov First Moscow State Medical University (Russia, 119435, Moscow, Bolshaya Pirogovskaya st., 2, bld. 4)
Doctor of technical sciences, chief scientific officer of the Integrated Electronics and Microsistems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq.,1).