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Rustem A. Sharipov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Integrated Electronics, engineer of the Scientific and Technological Center of Photomasks, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Nikita V. Krokhan

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Integrated Electronics, Engineer of the Scientific and Technological Center of Photomasks, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Vladislav D. Gromov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Laboratory Assistant of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Nikolay D. Kurochitsky

Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)
Technician, Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)

Maksim S. Komlenok

Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)
Cand. Sci. (Phys.-Math.), Senior Researcher, Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)
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