National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer-Designer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Phys.-Math.), Assoc. Prof. of the Higher Mathematics-1 Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; “Laboratory of Microdevices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Master’s degree student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; “Laboratory of Microdevices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer, “Laboratory of Microdevices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)