Persons
Roman L. Volkov
National Research University of Electronic Technology, Moscow, Russia
Research Assistent of the Center of Shared Research Facilities «Characterization and Modification of Microstructures and nanoobjects», National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Oleg A. Radaev
Ulyanovsk Branch of the Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, Russia, 432011, Ulyanovsk, Goncharov st., 48/2
Ilya V. Frolov
Ulyanovsk Branch of the Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, Russia, 432011, Ulyanovsk, Goncharov st., 48/2
Master, Researcher Assistent of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)